![](https://www.samco.co.jp/products/process/uploads/20190110SiO2RIE400ipb2.jpg)
This is a three-dimensional fabrication of quartz glass using a thick film resist with grayscale exposure, forming a ø50 μm stepped structure. The selectivity is about 1.
Photo courtesy of Yamagata research institute of technology
This is a three-dimensional fabrication of quartz glass using a thick film resist with grayscale exposure, forming a ø50 μm stepped structure. The selectivity is about 1.
Photo courtesy of Yamagata research institute of technology