製程SiO₂ etching

RIE plasma etching of SiO2

Trench etching of SiO2 us…

Three dimensional processing of quartz glass (10 μm square pyramid)

This is a three-dimension…

Three dimensional processing of quartz glass (stepped structure of ø50 μm)

This is a three-dimension…

Microfabrication of quartz glass

Processing of quartz glas…

Grating formation of SiO₂

Anisotropic plasma etchin…

High-speed etching of SiO₂

High-speed processing res…

150 μm deep etching of quartz

Deep etching of 150 μm of…