SEMICON China 2021
- Date
- 17-19 March 2021
- Location
- Shanghai New International Expo Centre Hall N2
- Booth
- 2167
- Contents
This year we will focus on these topics with new booth design.
If you are interested in discussion on our process capabilities, please visit our booth.- SiC MOSFETs
- GaN Power / RF Devices
- GaAs VCSELs
- MicroLEDs
- InP Lasers
- SiC/GaAs Via Hole Etch
- MEMS, TSV
- BAW Filters
- SAW Filters
- Optical Waveguide (LN/LT)
- Quantum Sensors
- SQUIDs
- Failure Analysis
- Products
-
- ICP etching system
- RIE system (novel low-cost)
- Si deep RIE system
- ALD (Atomic Layer Deposition) system
- Dual frequency PECVD system
- Aqua plasma cleaning system
- Link