Samco focuses on product development with emphasis on environment, health, and safety (EHS). Moreover, the company has been advancing research on water vapor plasma at low pressure , Aqua Plasma, and product development using the treatment technique. Thus far, the company has introduced reduction effects of oxidized copper and silver using Aqua Plasma.
Conventional methods to reduce the oxidized copper include hydrogen reduction and hydrogen plasma reduction. It has been reported that these methods use atomic hydrogen (H) and proton (H+) for reduction. However, hydrogen has a wide range of explosion limits of 4 to 75 vol% in the air. Therefore, it needs to be handled with care and safety equipment.
Water vapor excels in terms of EHS with low inflammable property. However, thus far, it has been used as an oxidizing agent, such as thermal oxidation of silicon wafers.
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