Plasma Cleaner PC-300
Compact plasma cleaner

Description

The PC-300 is a parallel-plate plasma cleaner to clean organic and inorganic contamination from the surface of samples.
The process chamber allows the user to install multiple electrode shelves, and the flexibility of the shelf electrode configuration supports batch processing of a wide range of products, from research to low volume production.

Key Features and Benefits

  • Processing up to 320 mm x 230 mm
  • Flexible shelf electrode allows the processing of a wide variety of samples in either RIE or Plasma Etching mode
  • With its sleek, compact design, the PC-300 requires minimal space
  • Fully automatic “one-button” operation with full manual override
  • PLC controller with touch screen provides an intuitive graphical interface
  • Dry pump and system layout allow for ease of maintenance
  • The reliable and durable system with a global installed base of more than 150 systems

Applications

  • Surface cleaning of plastic packages and lead-frames
  • Precision cleaning of optical components and molds
  • Surface modification (wettability and adhesion improvement)
  • Photoresist ashing, stripping, and descuming
  • Removal of organic contaminants





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