![](https://www.samco.co.jp/products/process/uploads/microfluidic.jpg)
Bosch Process
The RIE-400iPB is used to fabricate microfluidic channels (3 μm in width) by vertically processing Si.
Photo courtesy of Osaka University
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The RIE-400iPB is used to fabricate microfluidic channels (3 μm in width) by vertically processing Si.
Photo courtesy of Osaka University