In July 2023, the RIE-10NR, a capacitively coupled plasma (CCP) type reactive-ion etching (RIE) system designed for research and development purposes, achieved a significant milestone by surpassing the shipment of 500 units. Dr. Michihisa Yamamoto, Team Leader of the Quantum Electron Device Research Team at RIKEN Center for Emergent Matter Science, supervised the installation of the 500th RIE-10NR and warmly received a visit from our President and COO, Mr. Tsukasa Kawabe. During the meeting, Mr. Kawabe expressed his appreciation and presented Dr. Yamamoto with a commemorative gift.
Since its initial launch in December 1995, the RIE-10NR has gained recognition both domestically and internationally, being chosen by universities, research institutions, and companies. It has achieved a remarkable milestone of 500 units sold. The RIE-10NR stands as the de facto standard for CCP-RIE systems employed in research and development, renowned for its robustness, low cost of ownership, safety enhancements and user-friendly design, all while maintaining the original concept of simplicity and compactness.
The Quantum Electron Device Research Team at RIKEN has harnessed the capabilities of the RIE-10NR for the selective etching of two-dimensional material devices. During the commemorative meeting, Dr. Yamamoto shared the following remarks:
"We utilize the RIE-10NR to etch hexagonal boron nitride (hBN), an insulating material, which has been sandwiched around graphene, in order to facilitate graphene contact extraction. The RIE-10NR was our preferred choice due to its ability to perform selective etching and deliver superb repeatability. Notably, I previously utilized an older RIE-10NR model, dating back to 1998, during my tenure at the University of Tokyo. Surprisingly, even today, other professors at the University of Tokyo continue to rely on it. Its remarkable reliability has earned my unwavering trust over the years."
The RIE-10NR has garnered high praise from numerous customers, particularly for its outstanding process uniformity and repeatability. Samco's product line includes load-lock type systems with reaction chambers adhering to the same design concept, as well as highly automated cassette type systems tailored for volume manufacturing applications. This comprehensive offering allows us to provide consistent equipment solutions, spanning the full spectrum from research and development to production, thereby solidifying the RIE-10NR's status as the equipment of choice.
Guided by our fundamental corporate philosophy, "Contributing to the world's industrial science through thin-film technology," we remain committed to continuous improvement and the production of superior-quality equipment. Our aim is to deliver highly reliable solutions to universities, research institutions, and companies worldwide.
Mr. Tsukasa Kawabe, Samco President & COO (middle left) awards Dr. Yamamoto, Team Leader at RIKEN (middle right) a commemorative gift celebrating the 500th installation milestone of RIE-10NR on Friday, October 13, 2023.
About Samco Inc.
Samco Inc. (TSE: 6387) stands for Semiconductor And Materials Company, is a leading manufacturer of processing equipment for the semiconductor and related industries founded by Mr. Osamu Tsuji in Kyoto, Japan in 1979. Over the past forty-five years, more than 4,500 Samco systems have been installed and used in 35 different countries. Its equipment and thin film technology are widely adopted in the fabrication of semiconductor devices, including SiC/GaN power/RF devices, GaAs VCSELs, InP Laser Diodes, MEMS, BAW/SAW Filters TSVs, advanced packaging, and so on.
Learn more at https://www.samco.co.jp/en/.
Original article can be read here:
https://compoundsemiconductor.net/article/118434/Samco_announces_sales_milestone
SOURCE Samco Inc.
Released January 15, 2024
Company Contacts:
TSUCHIHASHI, Atsushi
Public Relations
Phone: 81-75-621-7841
E-mail: tsuchihashi@samco.co.jp