Samco, a leading manufacturer of etching, deposition and surface treatment processing equipment for the semiconductor market and related industries and academic facilities, has delivered an ALD (Atomic Layer Deposition) system to Hokkaido University as part of the Advanced Research Infrastructure for Materials and Nanotechnology in Japan (ARIM) project conducted by the Ministry of Education, Culture, Sports, Science and Technology (MEXT).

ARIM provides cutting-edge R&D support and technical consultation services through the shared use of its systems in the research and development of advanced materials such as nano devices and biotechnology, and promotes data collection and utilization in response to digital transformation (DX).

Professor Yasutaka Matsuo, Director of the Promotion Office for Nanotechnology Collaboration at Hokkaido University, highly evaluated Samco's advanced technology and excellent support, and selected Samco's ALD system, expecting it plays an essential role in ARIM.

The plasma ALD system (model: AD-230LP-H) has an efficient reaction chamber structure to achieve pinhole-free and high-density film deposition. In addition to thermal ALD, the plasma ALD method uses a unique ICP coil, enabling the deposition of various material films such as Al2O3, HfO2, SiO2 and other oxide films, nitride films and metal films.

Prof. Yasutaka Matsuo with the plasma ALD system (model: AD-230LP-H)

■Model: AD-230LP-H

　Size: 850 mm (W) x 2,450 mm (D) x 2,000 mm (H)

　Sample size: upto ø8" (ø230 mm tray transfer)

Since the development of the ALD system in 2015, Samco has accumulated many install base in the world's most advanced research institutes, such as the National Institute of Advanced Industrial Science and Technology (AIST) and the National Institute for Materials Science (NIMS).

In the future, Samco will organize a dedicated ALD team and focus on ALD process and system development more than ever before to develop the ALD process for new markets such as medical healthcare and the fabrication equipment market for electronic devices.


About Samco Inc.

Samco Inc. (TSE: 6387) stands for Semiconductor And Materials Company, and is a leading manufacturer of processing equipment for the semiconductor and related industries founded by Mr. Osamu Tsuji in Kyoto, Japan in 1979. Over the past forty-three years, more than 4,300 Samco systems have been installed and used in 35 different countries. Its equipment and thin film technology are widely adopted in the fabrication of semiconductor devices, including high-frequency filters, SiC/GaN power devices, GaAs VCSELs, micro-OLED/LED, CMOS image sensors, MEMS, TSVs, advanced packaging, and so on. Learn more at https://www.samco.co.jp/en/

Company Contacts:

TSUCHIHASHI, Atsushi

Public Relations

Phone: 81-75-621-7841

E-mail: tsuchihashi@samco.co.jp