EuroNanoLab 2024
- Date
- April 9-12, 2024
- Location
- University of Twente, Enschede, Netherlands
- Contents
EuroNanoLab Experts School: Dry Etching
The Dry Etch Experts School provides a platform for experts in dry etching technologies to meet and share ideas, recent achievements and challenges, and discover new advances in equipment hardware and processing technologies related to plasma etching.
The lectures will be given by internationally recognized academic and industrial experts in the field. The primary objective is to educate and train process engineers on various aspects of dry etching, encompassing fundamental principles, process simulation/modelling, plasma sources, and diverse applications.- Link